Germanium and silicon kinoform focusing lenses for hard x-rays
نویسندگان
چکیده
Progress in synchrotron radiation instrumentation and successful fabrication of novel x-ray optics enables probing the matter at microand nano-scales from virtually any sciences – from biomedical, environmental to material sciences. In-line, compact focusing optics, based on refraction, are designed and fabricated for use in hard and very hard x-ray beamlines at Diamond. The first test results at a Diamond beamline, using micro-focusing silicon and germanium lenses, are discussed in this paper.
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Fabrication of silicon kinoform lenses for hard x-ray focusing by electron beam lithography and deep reactive ion etching
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